In order to achieve reactive power compensation for large-capacity capacitive loads with high power density, this article developed a set of high-frequency and high-voltage power supply devices based on capacitive loads. The device consists of a rectifier part, an inverter part and a protection control system. It uses a voltage-type PWM (Pulse-Width Modulation) rectifier to realize the output voltage and current regulation of the high-frequency and high-voltage power supply through the series resonance link. Experimental results show that the stability of the device can reach up to 93.8%, the efficiency can reach 93.4%, and the response time can be shortened to 203 ms. At the same time, it also shows that devices based on capacitive loads can better maintain the stability of the output voltage in terms of stability, convert input energy into output voltage more efficiently, and have faster response times.