MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor Design with Electromechanics Interface
摘要
This study simulates and examinesthe MEMS design process for a hypothetical sensor with an electromechanical interface. Conceptualizing the sensor entails establishing its purpose, operational environment, and capacitive sensing mechanism for sensitivity and precision. Geometric and physical models are developed using advanced COMSOL Multiphysics software to create a moveable proof mass supported by micro-fabricated beams. Static and dynamic finite element analysis (FEA) simulations can be used to evaluate the sensor’s mechanical reaction to input signals and electrode electrostatic forces. This guarantees that mechanical signals are properly transformed into electrical signals. These data are evaluated to determine the best performance criteria such as sensitivity, linearity, and thermal stability, resulting in iterative design improvements. Robustness analysis, including tolerance and FMEA, ensures dependability. Additionally, typical MEMS manufacturing technologies are being examined for fabrication. This simulation-driven strategy prioritises electro-mechanical interface issues throughout the design process, resulting in high-performance, and dependable MEMS sensors for a wide range of applications.