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Micromachining, a material processing technology, employs a subtractive method to generate features within the range of 1–500 μm, as noted by Masuzawa in CIRP Ann Manuf Technol 49:473–488 (2000). This versatile technique finds widespread application in various industries, including biomedical, automotive, aerospace, semiconductor, MEMS, and consumer electronics, driven by the escalating demand for product miniaturization. Broadly speaking, micromachining methods can be classified into two categories: tool-based micromachining and beam-based micromachining.

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Introduction

  • 章节

  • 发表日期：

    2025年

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  • Tanveer Saleh,
  • Mir Akmam Noor Rashid,
  • Wan Ahmad Bin Wan Azhar,
  • Wazed Ibne Noor

摘要

Micromachining, a material processing technology, employs a subtractive method to generate features within the range of 1–500 μm, as noted by Masuzawa in CIRP Ann Manuf Technol 49:473–488 (2000). This versatile technique finds widespread application in various industries, including biomedical, automotive, aerospace, semiconductor, MEMS, and consumer electronics, driven by the escalating demand for product miniaturization. Broadly speaking, micromachining methods can be classified into two categories: tool-based micromachining and beam-based micromachining.