The main aim of this survey is to provide wider insight about the use of MEMS (Micro-Electro-Mechanical-System) technology in various interdisciplinary fields. The areas include IoT (Internet-Of-Things) for smart automations, agricultural field for performing precision farming. Automotive sector to predict failures, environmental aspects to detect factors affecting ecosystem, food control to measure the quality. Healthcare for identifying the disease in prior stages, robotics to carry out multiple operations. Machine Learning algorithms play vital role in classifying and extracting the necessary feature from the raw data. Deep Learning techniques like ANN (Artificial Neural Network) is employed for estimation of optimal input and output parameters. CNN (Convolutional Neural Network) for representing the designed structure in binary pixelated image form. The various types of sensors, energy harvesters, transducers and actuators which are designed using MEMS technology and their predominant role in recent advancements has been discussed in brief.

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Exploring the Microcosm: A Comprehensive Survey of Micro Sensor Applications Across Multidisciplinary Research

  • R. Nandhini,
  • R. Radha

摘要

The main aim of this survey is to provide wider insight about the use of MEMS (Micro-Electro-Mechanical-System) technology in various interdisciplinary fields. The areas include IoT (Internet-Of-Things) for smart automations, agricultural field for performing precision farming. Automotive sector to predict failures, environmental aspects to detect factors affecting ecosystem, food control to measure the quality. Healthcare for identifying the disease in prior stages, robotics to carry out multiple operations. Machine Learning algorithms play vital role in classifying and extracting the necessary feature from the raw data. Deep Learning techniques like ANN (Artificial Neural Network) is employed for estimation of optimal input and output parameters. CNN (Convolutional Neural Network) for representing the designed structure in binary pixelated image form. The various types of sensors, energy harvesters, transducers and actuators which are designed using MEMS technology and their predominant role in recent advancements has been discussed in brief.