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To study the vibration propertis of Ni–Nb–Zr thin-film amorphous alloys (TFAAs) for ultrasonic sensor applications, a new structure with a weight for the Ni–Nb–Zr TFAAs diaphragm was designed to replace the conventional material, Poly-Si. Diaphragms with two compositions were fabricated, with resonant frequencies below 10 kHz. The vibration characteristics and fatigue properties were assessed at each resonant frequency. The dimensions of the new structure were that the diaphragm had a diameter of 5.0 mm, a thickness of 0.003 mm and the weight had a diameter of 2.5 mm. The results showed that for the Ni48Nb24Zr28 TFAA, instantaneous crystallization and subsequent break occurred, while a stress amplitude of σ = 1.16 GPa was applied. However, at a stress amplitude of σ = 1.08 GPa, the sample did not break even after 8.34 × 109 cycles, indicating a high fatigue limit. On the other hand, the Ni56Nb18Zr26 TFAA exhibited instantaneous crystallization and broke at a stress amplitude of σ = 0.66 GPa. These findings suggested that Ni–Nb–Zr TFAAs, particularly the Ni48Nb24Zr28 alloy, exhibited superior fatigue resistance and high durability, making them promising materials for developing more reliable and long-lasting ultrasonic sensors.

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The Fatigue Properties of Ni–Nb–Zr Thin-Film Amorphous Alloys Under Ultrasonics Vibration

  • 会议论文

  • 发表日期：

    2025年

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  • Jinglan Xie,
  • Kentaro Kawamura,
  • Chiemi Oka,
  • Seiichi Hata,
  • Junpei Sakurai

摘要

To study the vibration propertis of Ni–Nb–Zr thin-film amorphous alloys (TFAAs) for ultrasonic sensor applications, a new structure with a weight for the Ni–Nb–Zr TFAAs diaphragm was designed to replace the conventional material, Poly-Si. Diaphragms with two compositions were fabricated, with resonant frequencies below 10 kHz. The vibration characteristics and fatigue properties were assessed at each resonant frequency. The dimensions of the new structure were that the diaphragm had a diameter of 5.0 mm, a thickness of 0.003 mm and the weight had a diameter of 2.5 mm. The results showed that for the Ni48Nb24Zr28 TFAA, instantaneous crystallization and subsequent break occurred, while a stress amplitude of σ = 1.16 GPa was applied. However, at a stress amplitude of σ = 1.08 GPa, the sample did not break even after 8.34 × 109 cycles, indicating a high fatigue limit. On the other hand, the Ni56Nb18Zr26 TFAA exhibited instantaneous crystallization and broke at a stress amplitude of σ = 0.66 GPa. These findings suggested that Ni–Nb–Zr TFAAs, particularly the Ni48Nb24Zr28 alloy, exhibited superior fatigue resistance and high durability, making them promising materials for developing more reliable and long-lasting ultrasonic sensors.