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Thin-film thermocouples are widely used in microelectronics, precision instrumentation, and aerospace because of their fast response, small size, and light weight. However, accurate temperature measurement cannot be separated from accurate calibration. This paper systematically studies the calibration method of NiCr–NiSi thin-film thermocouples, discusses the main factors affecting the calibration accuracy, and proposes specific measures to optimize the calibration process. Through experimental verification, the optimized calibration method significantly improves the measurement accuracy and stability of the thin-film thermocouple.

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Improvements in Calibration Methods for NiCr–NiSi Thin-Film Thermocouples

  • 会议论文

  • 发表日期：

    2026年

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  • Zhihui Liu,
  • Yingyu Chen,
  • Haochen Wang,
  • ZiXi Wang,
  • Wanyu Ding

摘要

Thin-film thermocouples are widely used in microelectronics, precision instrumentation, and aerospace because of their fast response, small size, and light weight. However, accurate temperature measurement cannot be separated from accurate calibration. This paper systematically studies the calibration method of NiCr–NiSi thin-film thermocouples, discusses the main factors affecting the calibration accuracy, and proposes specific measures to optimize the calibration process. Through experimental verification, the optimized calibration method significantly improves the measurement accuracy and stability of the thin-film thermocouple.