Design of High Voltage Pulse Generator Based on SiC Resonant Circuit in 10 kV Dielectric Barrier Discharges Applications
摘要
To meet the requirements of uniform and stable discharge plasma, high ionization efficiency and fast plasma diffusion, a bipolar 10 kV 1 kW high-voltage pulse power is designed with the adjustable amplitude and pulse width. The proposed scheme adopts SiC Buck-LLC topology, which can produce a controlled amplitude of 5 kV ~ 10 kV. As the SiC MOSFET rising edge is at ns level, the high precision pulse is realized to improve discharge stability. The 10 kV high-voltage pulse source simulation is built in MATLAB to verify the circuit principle and the prototype is built to verify the proposed topology.