Emerging materials with novel properties are of utmost interest for the very existence of MEMS and NEMS systems. The devices in which only standard planar technology materials are used (silicon, silica, noble metals, polymers—photoresists) can only achieve a fraction of multifunctionalities attainable with innovative materials. Further, the new materials must be able to retain their functions at nanoscale, a requirement that a vast majority of conventional functional materials do not fulfill. Here we consider several classes of structured materials, some of which were only recently discovered, while most of them are under intensive research at the moment of writing this text. We consider a possible classification of such materials, to further focus our attention on some of the most important ones. These include nanoscale composites with engineered properties, architectured nanomaterials, different metamaterials and metasurfaces, novel nano-biomaterials, quantum materials. Among the functionalities we consider are nanoscale ferroelectricity, nano-magnetism, nano-piezoelectricity, thermal management for micro and nanosystems, nanoscale phase change materials, and nanoscale shape memory alloys. Some attractive applications of multifunctionalities offered by these materials are considered, together with their integration with trending technologies like Internet of Things, Artificial Intelligence, etc. The chapter is concluded with a short summary of the presented insights.