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The evaluation of both the tracking accuracy of individual axes and contour error between them is a critical element in X-Y precision planar motion stages of precision machining. This paper suggests a dual contour error compensation control strategy for such systems. The traditional PID based contour error compensation control algorithm (PID-CEC) coordinates the two axes, calculates contour errors in real time, and improves contour control accuracy. This study replaces the aforementioned PID controller with an iterative learning controller, creating an ILC-type contour error compensation controller (ILC-CEC), which improves the control signal by learning from past control actions. Building on the aforementioned foundation, pre-compensation parameters can be determined through control block diagram analysis and contour error modeling, forming an ILC-type dual contour error compensation controller (ILC-DCEC). This controller can further enhance tracking accuracy and reduce contour errors. Results show that the new algorithm outperforms previous methods in reducing contour errors and improving robustness.

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Position Control of X-Y Planar Motion Stage Based on Pre-Compensation and Cross-Coupled Iterative Learning

  • 会议论文

  • 发表日期：

    2025年

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  • Guopeng Zhang,
  • Tao Zhang,
  • Qingxin Li,
  • Li Chen,
  • Hualiang Zhang,
  • Yiqiang Zhang,
  • Hao Wang

摘要

The evaluation of both the tracking accuracy of individual axes and contour error between them is a critical element in X-Y precision planar motion stages of precision machining. This paper suggests a dual contour error compensation control strategy for such systems. The traditional PID based contour error compensation control algorithm (PID-CEC) coordinates the two axes, calculates contour errors in real time, and improves contour control accuracy. This study replaces the aforementioned PID controller with an iterative learning controller, creating an ILC-type contour error compensation controller (ILC-CEC), which improves the control signal by learning from past control actions. Building on the aforementioned foundation, pre-compensation parameters can be determined through control block diagram analysis and contour error modeling, forming an ILC-type dual contour error compensation controller (ILC-DCEC). This controller can further enhance tracking accuracy and reduce contour errors. Results show that the new algorithm outperforms previous methods in reducing contour errors and improving robustness.