This paper presents a 2-DOF XY precision positioning platform using novel bridge-type mechanisms. In the presented platform, novel bridge-type mechanisms are used to amplify the output displacement in serials. The kinematics and statics of the platform have been analyzed by the pseudo-rigid-body-modeling method and the compliance matrix method. Finite element analysis is used to validate the rationality of the platform design. The simulation results reveal that the amplification ratios of the novel bridge-type mechanism and the developed platform increased by 79.2% and 63.7%, respectively. The displacements of the platform in the X and Y directions are [0, 458.12 \({\mu m}\) ] and [0, 458.25 \({\mu m}\) ], respectively.

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Design of a 2-DOF XY Precision Positioning Platform Using Novel Bridge-Type Mechanisms

  • Siqi Cui,
  • Jinqiang Gan

摘要

This paper presents a 2-DOF XY precision positioning platform using novel bridge-type mechanisms. In the presented platform, novel bridge-type mechanisms are used to amplify the output displacement in serials. The kinematics and statics of the platform have been analyzed by the pseudo-rigid-body-modeling method and the compliance matrix method. Finite element analysis is used to validate the rationality of the platform design. The simulation results reveal that the amplification ratios of the novel bridge-type mechanism and the developed platform increased by 79.2% and 63.7%, respectively. The displacements of the platform in the X and Y directions are [0, 458.12 \({\mu m}\) ] and [0, 458.25 \({\mu m}\) ], respectively.