Accurately measuring the wideband electric field from Hz to MHz has important engineering significance in the field of fault diagnosis of equipment and transmission lines in power systems. The reported electric field sensors have disadvantages such as poor anti-interference ability, complex signal derivation, insufficient sensitivity and narrow response frequency, which cannot meet the high-precision intelligent sensing measurement requirements for fault diagnosis of power equipment. Electric field sensors based on microelectromechanical system (MEMS) have advantages such as small size, high sensitivity, and low cost. However, existing MEMS electric field sensors can only measure frequencies up to kHz. Improving its measurement sensitivity and ability to respond to electric fields in a wide frequency range is currently the key technical issue. This manuscript introduces a sensor for local electric field measurement with wide frequency based on MEMS induction electrodes. The interference to the electric field by the sensor is reduced by optimizing the design of the electrodes. Combined with the developed processing circuit for amplification, its sensitivity is further improved. The test results showed that the sensor could measure electric field changes in a wide frequency range from 10 Hz to 2.5 MHz, with a sensitivity of 10 V/mm and linearity of 99.9%. Compared with the existing MEMS electric field sensors and electro-optical sensors, this sensor has significant advantages such as high sensitivity, strong anti-interference ability, and wide frequency bandwidth. It has important engineering application value in intelligent sensing of electric field in power systems and fault diagnosis of high-voltage equipment.

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Monitoring of Electric Field in High-Voltage Equipment Based on a Wideband MEMS Sensor

  • Qingsong Liu,
  • Zhaoqing Lan,
  • Xiang Peng,
  • Mingchun Hou,
  • Shunbo Li,
  • Minghe Chi

摘要

Accurately measuring the wideband electric field from Hz to MHz has important engineering significance in the field of fault diagnosis of equipment and transmission lines in power systems. The reported electric field sensors have disadvantages such as poor anti-interference ability, complex signal derivation, insufficient sensitivity and narrow response frequency, which cannot meet the high-precision intelligent sensing measurement requirements for fault diagnosis of power equipment. Electric field sensors based on microelectromechanical system (MEMS) have advantages such as small size, high sensitivity, and low cost. However, existing MEMS electric field sensors can only measure frequencies up to kHz. Improving its measurement sensitivity and ability to respond to electric fields in a wide frequency range is currently the key technical issue. This manuscript introduces a sensor for local electric field measurement with wide frequency based on MEMS induction electrodes. The interference to the electric field by the sensor is reduced by optimizing the design of the electrodes. Combined with the developed processing circuit for amplification, its sensitivity is further improved. The test results showed that the sensor could measure electric field changes in a wide frequency range from 10 Hz to 2.5 MHz, with a sensitivity of 10 V/mm and linearity of 99.9%. Compared with the existing MEMS electric field sensors and electro-optical sensors, this sensor has significant advantages such as high sensitivity, strong anti-interference ability, and wide frequency bandwidth. It has important engineering application value in intelligent sensing of electric field in power systems and fault diagnosis of high-voltage equipment.