Ultra-precision fly-cutting machine tools, critical for micron/sub-micron machining in high-end manufacturing, are highly sensitive to environmental vibrations, which degrade machining accuracy. This study proposes three vibration isolation schemes. Corresponding control algorithms, i.e., robust H∞, LQG, fuzzy adaptive, are designed to address system uncertainties, measurement noise, and nonlinearities. Simulations prioritize the piezoelectric stack scheme with fuzzy adaptive control. Results show two-stage isolation significantly reduces vibration acceleration: RMS drops from 0.0024 m/s2 to 5.1221e–4 m/s2, maximum amplitude from 0.0094 m/s2 to 0.0019 m/s2. The simulated environmental vibration isolation system enhances vibration resistance and machining stability for the ultra-precision fly-cutting machine tool.

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Environmental Vibration Isolation Technology of the Ultra-Precision Fly-Cutting Machine Tool

  • Ziyao Ma,
  • Zhencheng Zheng,
  • Yiheng Chen,
  • Yu Chang,
  • Yuanyuan Ding,
  • Hanjing Lu,
  • Adeel Shehzad,
  • Xiaoting Rui

摘要

Ultra-precision fly-cutting machine tools, critical for micron/sub-micron machining in high-end manufacturing, are highly sensitive to environmental vibrations, which degrade machining accuracy. This study proposes three vibration isolation schemes. Corresponding control algorithms, i.e., robust H∞, LQG, fuzzy adaptive, are designed to address system uncertainties, measurement noise, and nonlinearities. Simulations prioritize the piezoelectric stack scheme with fuzzy adaptive control. Results show two-stage isolation significantly reduces vibration acceleration: RMS drops from 0.0024 m/s2 to 5.1221e–4 m/s2, maximum amplitude from 0.0094 m/s2 to 0.0019 m/s2. The simulated environmental vibration isolation system enhances vibration resistance and machining stability for the ultra-precision fly-cutting machine tool.