With the rapid development of high-end manufacturing fields such as semiconductor manufacturing, electronic packaging, and biomedicine, there is an increasingly urgent demand for high-precision planar motion and multi-degree-of-freedom cooperative control. Traditional motors are gradually revealing limitations in complex application scenarios, while the Permanent Magnet Synchronous Planar Motor (PMSPM) adopts a non-mechanical contact structure, directly driving the mover through electromagnetic fields, significantly simplifying the system structure and improving positioning accuracy and response speed. However, traditional PMSPMs face severe challenges in terms of magnetic field distribution uniformity and output thrust fluctuations. Based on these issues, this paper proposes a design scheme for a moving-magnet planar motor based on an improved trapezoidal Halbach permanent magnet array. Through research and analysis in areas such as magnetic geometry parameter optimization, magnetic field modeling of the permanent magnet array, motor electromagnetic force modeling, and finite element simulation verification, the overall performance of the motor is significantly enhanced.

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Research on Moving-Magnet Planar Motor Based on Improved Trapezoidal Halbach Permanent Magnet Array

  • Yuanjie Long,
  • Zhiyong Lan,
  • Fu Li,
  • Lai Qing Huang

摘要

With the rapid development of high-end manufacturing fields such as semiconductor manufacturing, electronic packaging, and biomedicine, there is an increasingly urgent demand for high-precision planar motion and multi-degree-of-freedom cooperative control. Traditional motors are gradually revealing limitations in complex application scenarios, while the Permanent Magnet Synchronous Planar Motor (PMSPM) adopts a non-mechanical contact structure, directly driving the mover through electromagnetic fields, significantly simplifying the system structure and improving positioning accuracy and response speed. However, traditional PMSPMs face severe challenges in terms of magnetic field distribution uniformity and output thrust fluctuations. Based on these issues, this paper proposes a design scheme for a moving-magnet planar motor based on an improved trapezoidal Halbach permanent magnet array. Through research and analysis in areas such as magnetic geometry parameter optimization, magnetic field modeling of the permanent magnet array, motor electromagnetic force modeling, and finite element simulation verification, the overall performance of the motor is significantly enhanced.