V-Shaped Stator Stepping Linear Ultrasonic Motor Based on Single Mode Excitation
摘要
In order to overcome the problems of complex linear ultrasonic motors, which are difficult to merge the modes and complicated driving mechanism, a stepping linear ultrasonic motor is proposed to be excited by a single mode of V-shaped stator and realize the power output by using the diagonal driving trajectory at the driving foot, which has the advantages of short power transmission path, high positioning accuracy and simple driving and control circuits. Firstly, the finite element software is used to explain the single-mode excitation mechanism of the V-shaped stator and the operation principle of the motor; secondly, a simulation model is constructed to simulate and analyze the stepping mode of the motor; finally, an experimental platform is constructed to carry out the experimental verification, and the results show that: under the excitation of intermittent sinusoidal or square wave single-phase voltage signals, the single-mode working mode of the V-shaped stator can be effectively excited, and the motor can be stepped with minimum open-loop stepping displacement resolution of up to 2.1 μm, and exhibits better stepping linearity under square-wave driving voltage.