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Silicon-based MEMS, known for their excellent mechanical, thermal, and electrical properties, are one of the most widely used MEMS technologies.

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Bulk Silicon Microfabrication Technology

  • 章节

  • 发表日期：

    2026年

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  • Jingmin Li,
  • Chong Liu,
  • Liding Wang

摘要

Silicon-based MEMS, known for their excellent mechanical, thermal, and electrical properties, are one of the most widely used MEMS technologies.