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Micro electro mechanical systems (MEMS) represent a cutting-edge multidisciplinary technology, which has originated from microelectronics.

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MEMS Overview

  • 章节

  • 发表日期：

    2026年

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  • Jingmin Li,
  • Chong Liu,
  • Liding Wang

摘要

Micro electro mechanical systems (MEMS) represent a cutting-edge multidisciplinary technology, which has originated from microelectronics.