The sulfur hexafluoride (SF6) gas is a widely used insulating medium in the power industry, but its significant emissions can have a major impact on the global climate. Degradation treatment of SF6 is an effective way to achieve gas recovery and emission reduction. Among them, nonthermal plasma SF6 degradation technology has received widespread attention from researchers. This paper elaborates on the mechanism of nonthermal plasma degradation of SF6, while providing a detailed introduction to the generation principles, performance characteristics, and research progress of three common discharge forms in recent years (microwave discharge, electron beam discharge, dielectric barrier discharge). Literature reviews indicate that the degradation performance of several discharge forms varies. Microwave discharge and electron beam discharge can handle larger flow rates and higher concentrations of SF6 waste gas, but they pose certain safety risks. Dielectric barrier discharge devices are simple, have low energy consumption, and are suitable for treating small flow rates of SF6 waste gas. However, nonthermal plasma technology is still in the exploratory stage, with many mechanisms not yet clear, and there are many issues that need to be resolved before industrial application of SF6 degradation can be achieved. Future research can further deepen the understanding of the degradation mechanism of SF6 and optimize the design of reactor structures, as well as explore the synergistic effects of plasma and catalysts, in order to achieve more efficient and sustainable SF6 waste gas degradation technology.