Large Mismatch Substrate Nitrides Quasi van der Waals Epitaxy
摘要
As a non-covalent epitaxy, QvdWE can greatly alleviate the lattice mismatch and thermal mismatch between the epitaxial layer and the substrate, which can improve the quality of nitrides epitaxial on the traditional substrate while expanding the range of substrate choices, and become a tool for exploring the nitride epitaxial on the new substrates. Commonly referred to as new substrates mainly include: metals and metal alloys, amorphous glass, amorphous plastics and so on. Compared with the traditional sapphire, Si, SiC, and other more commonly used single-crystal substrates, the above new amorphous substrates have many unique advantages, but there are also some problems.