In this chapter, an in-depth study of a novel 6-axis inertial measurement unit (IMU) structure based on the piezoelectric sensing principle is carried out. The advantage of this piezoelectric motion sensor is that it allows concurrent detection of the three components of linear acceleration as well as the three components of angular velocity using a single proof mass. The IMU structure is evaluated and optimized using finite element modeling simulations. In addition, we have presented the electronic detection circuitry responsible for dissociating the output signals for linear and angular data to ensure efficient system operation. The evaluated sensitivities of the mesoscale IMU design are 364 and 65.5 mV/g for in-plane and out-of-plane linear accelerations, respectively. In-plane and out-of-plane angular rate sensitivities are evaluated as 2.59 and 522 mV/rad/s, respectively. One of the particular interests of the developed conditioning circuit is that under no circumstances do the angular outputs disturb or affect the acceleration outputs, and vice versa.