As a non-invasive and non-contact cleaning technology, laser cleaning technology can efficiently clean the surface of materials without using harmful chemicals, and has little impact on the environment, so it has been widely concerned and developed rapidly [1]. However, the laser beam is a high-energy beam, and the laser cleaning of the interface is bound to have a complex thermal-mechanical coupling effect. The real-time monitoring of the cleanliness and integrity of the substrate surface during the laser scanning process is very important to ensure the effective cleaning of the matrix surface and avoid excessive cleaning damage to the substrate [2]. The research on accurate dynamic monitoring of the laser cleaning interface has become a hot issue widely used in laser cleaning technology [3].