Radiation Hardness Study of MALTA2 Sensor
摘要
MALTA2, the second generation of the MALTA family Depleted Monolithic Active Pixel Sensor, is fully fabricated using Tower’s 180 nm CMOS Imaging Sensor process. Extensive radiation hardness studies have been conducted using mixed hadron beams at CERN SPS to demonstrate their suitability for future High-Energy Physics (HEP) experiments. In this note, the results of the radiation hardness study of the MALTA2 sensor from the 2023 CERN SPS test beam campaign will be presented. Sensors fabricated on Czochralski substrates and high-doping of the n \(^{-}\) layer, irradiated to 3 \(\times \) 10 \(^{15}\) 1-MeV n \(_\text {eq}\) /cm \(^{2}\) , maximum efficiency of 90 \(\%\) was achieved and the efficiency is further improved to 99 \(\%\) by increasing the doping concentration in n \(^{-}\) layer.