Advancements in Surface Modification and Coloring Technologies for MEMS-Based Smart Windows: Enhancing Environmental Safety and Security with Ultra-Thin Germanium Films for Glare Reduction and Aesthetic Improvement
摘要
This study presents innovative, sustainable, and cost-effective solutions to reduce glare for road users caused by potential reflections from smart windows with micro electro mechanical systems (MEMS) micromirror arrays for daylight steering and privacy, while enhancing aesthetics by introducing various metallic colors. We present a novel approach integrating ultra-thin highly absorbing germanium (Ge) layers on aluminum (Al) top layers included in MEMS micromirror arrays. This technique enables rapid transition of a building’s facade from a highly reflective colored impression to a glass-like state. The surface colors are determined by the thickness of the Ge layer, and include vibrant options such as purple, dark blue, petrol, and reddish brown. This improves visual appeal, reduces glare effect, enhances road safety and aligns with principles of sustainability, making it an attractive option for widespread adoption. Furthermore, the dynamic performance of MEMS micromirrors is assessed by amplitude modulation response (AMR) studies, (1) offering detailed insights into their frequency response characteristics and (2) delivering crucial information about potential system lifetime and long-term reliability.