Surface acoustic wave (SAW) devices have attractive features. The SAW devices can be applied not only to the communication applications, such as filters and duplexers, but also to sensors and actuators. Droplet manipulation using SAW devices is one of the actuator applications, such as a digital microfluidic system (DMFS). The manipulation is caused by nonlinear acoustic phenomena caused by the longitudinal wave radiation from the SAW into the droplet. In this study, droplet manipulation and acoustic streaming using SAWs propagating in different directions on a 128°rotated Y-cut LiNbO3 (128Y-LiNbO3) are experimentally discussed. First, the SAW device with the two SAW propagation paths was designed based on the numerical calculation results. Then, the device was fabricated on 128Y-LiNbO3. Droplet manipulation distance for each propagation path was measured. When the power flow angle is not 0°, we found that the distance becomes shorter. The results suggest that the manipulation distance must be considered to realize the DMFS. Also, the acoustic streaming in a water vessel was observed. As the acoustic streaming velocity depends on the SAW amplitude, it is necessary to develop a measurement system for the SAW amplitude.

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Comparison of Nonlinear Acoustic Phenomena Caused by Surface Acoustic Waves on 128°rotated Y-Cut LiNbO3

  • Shoma Nagao,
  • Jun Kondoh

摘要

Surface acoustic wave (SAW) devices have attractive features. The SAW devices can be applied not only to the communication applications, such as filters and duplexers, but also to sensors and actuators. Droplet manipulation using SAW devices is one of the actuator applications, such as a digital microfluidic system (DMFS). The manipulation is caused by nonlinear acoustic phenomena caused by the longitudinal wave radiation from the SAW into the droplet. In this study, droplet manipulation and acoustic streaming using SAWs propagating in different directions on a 128°rotated Y-cut LiNbO3 (128Y-LiNbO3) are experimentally discussed. First, the SAW device with the two SAW propagation paths was designed based on the numerical calculation results. Then, the device was fabricated on 128Y-LiNbO3. Droplet manipulation distance for each propagation path was measured. When the power flow angle is not 0°, we found that the distance becomes shorter. The results suggest that the manipulation distance must be considered to realize the DMFS. Also, the acoustic streaming in a water vessel was observed. As the acoustic streaming velocity depends on the SAW amplitude, it is necessary to develop a measurement system for the SAW amplitude.