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This study presents analytical and 3D simulation model of MEMS-based capacitive pressure sensor system that is able to sense viscosity change of 0.1 mPa.s. Presented analytical model results that viscosity change of 0.1 mPa.s results in linear capacitance change greater than 1fF and pressure drop change in the order of \(10^{2}\) Pa when subjected to \(\upmu \text {L}/\text {min}\) flow. Analytical model is confirmed with the 3D simulation model of the system using COMSOL Multiphysics’s fluid-structure interaction package. These findings underscore the sensor system’s potential for rapid and precise in vitro diagnostics.

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Modeling of Microfluidic MEMS-Based Capacitive Pressure Measurement

  • 会议论文

  • 发表日期：

    2026年

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  • Seçkin Eroğlu,
  • Ayda Önsoy,
  • Çağrı Öztürk,
  • Barbaros Çetin,
  • Ender Yıldırım

摘要

This study presents analytical and 3D simulation model of MEMS-based capacitive pressure sensor system that is able to sense viscosity change of 0.1 mPa.s. Presented analytical model results that viscosity change of 0.1 mPa.s results in linear capacitance change greater than 1fF and pressure drop change in the order of \(10^{2}\) Pa when subjected to \(\upmu \text {L}/\text {min}\) flow. Analytical model is confirmed with the 3D simulation model of the system using COMSOL Multiphysics’s fluid-structure interaction package. These findings underscore the sensor system’s potential for rapid and precise in vitro diagnostics.