This work examines methods for creating microholes and complex-shaped cavities, as well as conical holes through their mechanical, electrophysical, electrochemical, and laser processing. Main issues in the formation of such structural elements are identified, with special attention being given to laser perforation. The work proposes a technology enabling laser processing of microholes with straight walls, as well as conical holes with a controlled degree of expansion from entrance to exit. We present a design for a laser head unit allowing expanding the range of beam propagation in space and implementing the proposed laser hole perforation technology.