Silicon carbide films have been intensively investigated concerning their fabrications and properties. In general, the thicknesses of the fabricated silicon carbide films can range from many micrometers to many nanometers. In this chapter, however, we shall focus on the nanostructured SiC films including the films with thicknesses on the nanoscale and the films comprising SiC nanocrystals. We shall summarize the fabrication, structures, and properties of these nanostructured SiC films.