Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) are increasingly utilized in industrial and biomedical applications due to their high sensitivity, miniaturized size, and ability to operate at high frequencies. However, traditional pMUTs often contain lead, posing significant environmental and health risks. This study focuses on the acoustic characterization of a lead-free Aluminum Nitride (AlN) pMUT array, highlighting its potential to provide high-performance sensing while eliminating the hazards associated with lead-based materials. The measurement setup includes a function generator to stimulate the lead-free AlN pMUT array and a Xarion ETA 450 Ultra laser microphone to capture the acoustic signals. The microphone, characterized by high sensitivity and a broad frequency range, enables precise acoustic measurements. A mechanical arm adjusts the distance between the microphone and the pMUT array, allowing measurements at distances ranging from 1 to 4 cm. Results show a clear attenuation of the acoustic signal with increasing distance, with peak-to-peak voltage decreasing from 16.81 V at 1 cm to 4.50 V at 4 cm. In conclusion, the lead-free AlN pMUT array demonstrates effective near-field acoustic performance, validating its potential for precise industrial and biomedical applications.

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Lead-Free AlN pMUT Array: Acoustic Characterization in the Near Field

  • L. Barretta,
  • D. Giusti,
  • R. Scaldaferri,
  • A. Esposito

摘要

Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) are increasingly utilized in industrial and biomedical applications due to their high sensitivity, miniaturized size, and ability to operate at high frequencies. However, traditional pMUTs often contain lead, posing significant environmental and health risks. This study focuses on the acoustic characterization of a lead-free Aluminum Nitride (AlN) pMUT array, highlighting its potential to provide high-performance sensing while eliminating the hazards associated with lead-based materials. The measurement setup includes a function generator to stimulate the lead-free AlN pMUT array and a Xarion ETA 450 Ultra laser microphone to capture the acoustic signals. The microphone, characterized by high sensitivity and a broad frequency range, enables precise acoustic measurements. A mechanical arm adjusts the distance between the microphone and the pMUT array, allowing measurements at distances ranging from 1 to 4 cm. Results show a clear attenuation of the acoustic signal with increasing distance, with peak-to-peak voltage decreasing from 16.81 V at 1 cm to 4.50 V at 4 cm. In conclusion, the lead-free AlN pMUT array demonstrates effective near-field acoustic performance, validating its potential for precise industrial and biomedical applications.