Effect of Material Parameters on the Statics and Dynamics of Micro Clamped–Clamped Beam Under Electro-Static Actuation
摘要
The statics and dynamics of the micro clamped–clamped beam having different material properties under electrostatic actuation is presented. The threshold displacement and voltage differentiating the stable operating region from the unstable region are determined using Bubnov-Galerkin approach. The influence of the variation in material properties on the pull-in conditions is investigated.