The electrical discharge machining (EDM) process has many variants like die-sinking μ-EDM, wire μ-EDM, etc. These processes are pragmatic in micro fields to manufacture micro slots, micro holes, micro moulds, microelectromechanical systems (MEMS), etc. The μ-EDM process is significantly used for making smaller dimensional components. This method is superior with regard to power density, material removal efficiency and energy efficiency in comparison to conventional EDM process. Various input parameters of the μ-EDM process have been analyzed to study their influence on the machining characteristics for quality assessment while fabricating at the micro level. This chapter systemically presents and discusses the vital aspects of the μ-EDM process. The μ-EDM variants are discussed by highlighting the influence of the different μ-EDM parameters. The electrical and non-electrical parameters are discussed in-depth. The μ-EDM response characteristics are elaborated in a systematic way. The study of micro tools, workpieces, and dielectric fluids with their proficiencies is also discussed. The electrical circuit of the EDM method based on the resistance–capacitance (R–C) generator and transistor pulse generator with respective features are explicated. The research perspectives in μ-EDM are also briefly discussed.