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Yttrium oxide (Y₂O₃) nanomaterials are promising host materials for rare-earth ions like Nd3⁺, owing to their high surface-to-volume ratio. In this study, Nd3⁺-doped Y₂O₃ nanograin films with varying Nd concentrations were deposited on Si (100) substrates using aerosol-assisted chemical vapor deposition (AACVD). The films were heat-treated at 600 ℃, 800 ℃, and 1000 ℃ to enhance their crystallinity and optical properties. X-ray diffraction analysis revealed a transition from amorphous to crystalline structures with increasing annealing temperature, while SEM images showed smoother surfaces at higher temperatures. Notably, the Nd-doped film with 2.5 at.% Nd, heat-treated at 1000 ℃, exhibited superior optical performance. These findings suggest that heat treatment significantly improves the crystallinity and luminescent properties of Nd3⁺:Y₂O₃ films, highlighting their potential for optoelectronic applications.

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Optical Properties of Liquid Phase CVD Deposited Oxides Thin Films Doped Lanthanide Ions

  • 会议论文

  • 发表日期：

    2025年

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  • Ridha Elleuch,
  • Marwa Ben Chobba,
  • Maryam Mallek,
  • Ramzi Maalej

摘要

Yttrium oxide (Y₂O₃) nanomaterials are promising host materials for rare-earth ions like Nd3⁺, owing to their high surface-to-volume ratio. In this study, Nd3⁺-doped Y₂O₃ nanograin films with varying Nd concentrations were deposited on Si (100) substrates using aerosol-assisted chemical vapor deposition (AACVD). The films were heat-treated at 600 ℃, 800 ℃, and 1000 ℃ to enhance their crystallinity and optical properties. X-ray diffraction analysis revealed a transition from amorphous to crystalline structures with increasing annealing temperature, while SEM images showed smoother surfaces at higher temperatures. Notably, the Nd-doped film with 2.5 at.% Nd, heat-treated at 1000 ℃, exhibited superior optical performance. These findings suggest that heat treatment significantly improves the crystallinity and luminescent properties of Nd3⁺:Y₂O₃ films, highlighting their potential for optoelectronic applications.