This study presents a novel configuration of an electrothermal micromotor optimized for high torque output. The enhanced device, with an overall diameter of 2400 µm, has been successfully designed and fabricated utilizing MEMS technology on a silicon-on-insulator (SOI) platform. A structure of improved driving mechanisms has been added to overcome a fabrication gap of MEMS-based micromotor, which occurs frequently after deep reactive ion etching (DRIE) process. Additionally, a particle swarm optimization (PSO) approach is employed to determine the optimal geometric parameters of the V-shaped beams, thereby maximizing the displacement efficiency of the electrothermal actuator. The micromotor's enhanced configuration is validated through simulation and experimental results, confirming its suitability for high-precision MEMS applications.

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High-Output-Torque Electrothermal Micromotor

  • Dzung Tien Nguyen,
  • Kien Trung Hoang,
  • Phuc Hong Pham

摘要

This study presents a novel configuration of an electrothermal micromotor optimized for high torque output. The enhanced device, with an overall diameter of 2400 µm, has been successfully designed and fabricated utilizing MEMS technology on a silicon-on-insulator (SOI) platform. A structure of improved driving mechanisms has been added to overcome a fabrication gap of MEMS-based micromotor, which occurs frequently after deep reactive ion etching (DRIE) process. Additionally, a particle swarm optimization (PSO) approach is employed to determine the optimal geometric parameters of the V-shaped beams, thereby maximizing the displacement efficiency of the electrothermal actuator. The micromotor's enhanced configuration is validated through simulation and experimental results, confirming its suitability for high-precision MEMS applications.