The physical Vapor Deposition (PVD) surface treatment process consists of numerous steps involving of multi-physical and multi-scale phenomena. These phenomena are beyond the ability of human perception in their entirety which is a scientific challenge for learning PVD. The present article proposes a Virtual Reality (VR) approach dedicated to the PVD process learning and a prototype is developed with different modules. The virtual immersion includes two modalities. One ex-situ, in the surface treatment laboratory, at a real scale (1:1), allowing users to explore the process, the machine components, and to experiment with technical gestures such as handling the machine door or installing substrate-holder rods inside. The second modality is in-situ, enabling the user to follow the process steps immersed in an environment inaccessible to humans and multi-scale. These experiments help to understand the physical phenomena occurring throughout the deposition process (pumping, visualization of atoms and molecules, plasma, sputtering, and growth). The data feeding the application comes from measurements from the real system as well as from numerical simulations.

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“Virtual PVD”: A Virtual Reality Approach to Explore PVD Magnetron Sputtering

  • Aurélien Besnard,
  • Ruding Lou

摘要

The physical Vapor Deposition (PVD) surface treatment process consists of numerous steps involving of multi-physical and multi-scale phenomena. These phenomena are beyond the ability of human perception in their entirety which is a scientific challenge for learning PVD. The present article proposes a Virtual Reality (VR) approach dedicated to the PVD process learning and a prototype is developed with different modules. The virtual immersion includes two modalities. One ex-situ, in the surface treatment laboratory, at a real scale (1:1), allowing users to explore the process, the machine components, and to experiment with technical gestures such as handling the machine door or installing substrate-holder rods inside. The second modality is in-situ, enabling the user to follow the process steps immersed in an environment inaccessible to humans and multi-scale. These experiments help to understand the physical phenomena occurring throughout the deposition process (pumping, visualization of atoms and molecules, plasma, sputtering, and growth). The data feeding the application comes from measurements from the real system as well as from numerical simulations.