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This paper considers the sensitive element of resonant frequency pressure sensor. Analysis of the characteristics of this device has shown that its main disadvantages are low sensitivity values. To solve this problem, it is suggested to replace monocrystalline silicon resonators with composite resonators based on Al2O3\Ti with subsequent change of their geometry and configuration. In order to confirm the effectiveness of this method, the modeling of silicon and composite membranes is presented, showing the change in the intrinsic frequencies and internal stress. #COMESYSO1120.

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Studying of Mechanical Parameters of Sensing Element of Composite Resonant Frequency Pressure Sensor

  • 会议论文

  • 发表日期：

    2025年

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  • Alena Talovskaia,
  • Evgenii Barbin,
  • Denis Mokhovikov,
  • Sergey Vtorushin,
  • Ivan Kulinich,
  • Tamara Nesterenko

摘要

This paper considers the sensitive element of resonant frequency pressure sensor. Analysis of the characteristics of this device has shown that its main disadvantages are low sensitivity values. To solve this problem, it is suggested to replace monocrystalline silicon resonators with composite resonators based on Al2O3\Ti with subsequent change of their geometry and configuration. In order to confirm the effectiveness of this method, the modeling of silicon and composite membranes is presented, showing the change in the intrinsic frequencies and internal stress. #COMESYSO1120.