Detecting Angle and Defocus Distance in High-Precision Laser Manufacturing by Utilizing Newton Numerical Method
摘要
In modern laser processing, the necessity for high precision in identifying the focal position of the laser beam in the manufacturing process has been a challenging task. This demanding task encourages researchers to exploit the field of autofocusing technology to determine the focal position, at which the intensity is the highest and the beam waist is the smallest. A large number of techniques have been provided to achieve the desirable accuracy, these techniques perform a reliable result, however, only a certain method carefully examines the tilt of the specimen. In this paper, we propose an optical design capable of not only detecting the defocus distance but also the tilt angle of the specimen as well. To achieve this result, a theoretical model is provided that realizes the relationship between the tilt angle and the defocus distance with the result on the CCD Camera, this relationship will then be solved by a numerical method. This approach is aimed to be able for application in both science and industry for mass production, furthermore, it is expected for research to develop this as a useful technique for the manufacturing process.