Development and Experimental Evaluation of a Compliant Rotary Motor for Precision Positioning Applications
摘要
This paper illustrates the development of a high-precision rotary motor from the initial concept for working principle to the final compact design for prototype fabrication and displacement testing. The proposed motor consists of two independent modules with significant merits for micro/nano positioning and alignment tasks, i.e., a standard DC motor that provides the input torque corresponding to the electrical current value for actuating the design, and the 6061T6 aluminum alloy compliant bearings which are capable of performing precise and high-repeatability rotational motion by the material deformation in elastic region. Furthermore, a highly linear transfer function to control the motor is also developed based on Hooke’s law by solving the 6 \({\times}\) 6 stiffness matrix of the compliant bearings analytically. The finite element method (FEM) through static structural simulation in ANSYS and some experimental works are then carried out to verify the analytical results, to ensure the correctness of calculated results and demonstrate the actual performance of the developed motor.