The Scanning Electron Microscope
摘要
Louis de Broglie proposed that electrons have dual behavior, both wave and particle, which laid the foundation for the birth of a new and powerful light source that, along with the emergence of electromagnetic optics, led to the development of electron microscopy. The first SEM was developed by Von Ardenne and had a resolution of approximately 100 microns. The information generated by this type of microscope pertains to the surface topography of a sample, and the depth of the obtained information depends on the energy and the density of the sample itself. An SEM consists of an electron gun, a column containing electromagnetic lenses, a scanning coil, and the sample chamber where the specimen is placed. The electron–sample interaction generates, among other things, low-energy electrons, which are attracted by a detector for subsequent photomultiplication, a process essential for image generation. The information provided by an SEM is not limited to topographical images; it can also be complemented with pixel-by-pixel chemical content for a more detailed analysis through the equipment of an energy-dispersive spectroscopy (EDS) system.