This paper presents the design, simulation, and parametric optimization of a 30 GHz circular-shaped coplanar waveguide (CPW)-fed micro-sensor. The proposed design, based on a previous model, introduces modifications to the resonator shape and feed lines to enhance performance. A detailed parametric study evaluates the effects of various geometric parameters, such as feed line position, ground plane width, and gap position, on the sensor’s impedance matching and resonance frequency. The study also examines the impact of a superstrate layer and vertical membrane displacement on the sensor’s performance. Results demonstrate that the optimized design achieves a high sensitivity of approximately 1.2 GHz/μm, with improved impedance matching and resonance control through adjustments in permittivity and layer thickness. The proposed micro-sensor is well suited for high-frequency applications, offering enhanced sensitivity and tunability for precise pressure sensing.