Nanomanufacturing represents the future of US manufacturing. Nanostructured materials and processes have been estimated to increase their market impact to about $340 billion per year in the next 10 years. In the past decade, tremendous efforts have been devoted to basic nanoscience discovery, novel process development, and concept proof of nano devices. Yet much less research activities have been undertaken in nanomanufacturing to duplicate the success of transforming quality and productivity performance of traditional manufacturing. High cost of processing has been a major barrier of transferring the fast-developing nanotechnology from laboratories to industry applications. The process yield of current nano devices is typically 10% or less. Hence, there is an imperative need of process improvement methodologies for nanomanufacturing.