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This study presents a salinity optical sensor based on a composite Si-Si₃N₄ waveguide structure. The sensor leverages the hybridization of Si and Si₃N₄ waveguide modes to enhance light-matter interactions, critical for high sensitiity optical sensing. This has been achieved by incorporating the waveguide structure, in a Mach-Zehnder Interferometer (MZI), into the sensor to detect changes refractive index arising from different concentrations of salt. Simulation results show that the sensor exhibits a high sensitivity with 88.74 nm/ RIU wavelength shift which is equivalent to 55 pm/% salt concentration. This method is a reliable low-cost option for real time salinity monitoring in multiple aquatic environments.

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Salinity Optical Sensor Based on Si-Si3N4 Composite Waveguide Structure

  • 会议论文

  • 发表日期：

    2025年

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  • Thanh Tung Bui,
  • H. Y. Pham,
  • T. A. Nguyen

摘要

This study presents a salinity optical sensor based on a composite Si-Si₃N₄ waveguide structure. The sensor leverages the hybridization of Si and Si₃N₄ waveguide modes to enhance light-matter interactions, critical for high sensitiity optical sensing. This has been achieved by incorporating the waveguide structure, in a Mach-Zehnder Interferometer (MZI), into the sensor to detect changes refractive index arising from different concentrations of salt. Simulation results show that the sensor exhibits a high sensitivity with 88.74 nm/ RIU wavelength shift which is equivalent to 55 pm/% salt concentration. This method is a reliable low-cost option for real time salinity monitoring in multiple aquatic environments.