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This chapter describes the most important experimental work carried out by the author using sensor modules with double-delay line, made on the substrate of Y–Z lithium niobateLithium Niobate (LiNbO3). This substrate is characterized by a good electromechanical coefficient, which provides in many cases decent acoustoelectricAcoustoelectric (AE) responses. The work concerns the sensory properties of selected single, bilayer structures, as well as prototype multi-layer structures, in which additional layers perform limiting functions, e.g. the influence of water vapor. However, the most attention has been paid to the semiconductor–metal bilayer structures, e.g. phthalocyanine-palladiumPalladium (Pd) and tungsten oxideTungsten Oxide (WO3)-palladiumPalladium (Pd), as they are the most promising in terms of practical applications in hydrogen sensors.

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Study of Selected Sensor Structures with SAW

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  • 发表日期：

    2025年

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  • Wiesław Jakubik

摘要

This chapter describes the most important experimental work carried out by the author using sensor modules with double-delay line, made on the substrate of Y–Z lithium niobateLithium Niobate (LiNbO3). This substrate is characterized by a good electromechanical coefficient, which provides in many cases decent acoustoelectricAcoustoelectric (AE) responses. The work concerns the sensory properties of selected single, bilayer structures, as well as prototype multi-layer structures, in which additional layers perform limiting functions, e.g. the influence of water vapor. However, the most attention has been paid to the semiconductor–metal bilayer structures, e.g. phthalocyanine-palladiumPalladium (Pd) and tungsten oxideTungsten Oxide (WO3)-palladiumPalladium (Pd), as they are the most promising in terms of practical applications in hydrogen sensors.