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This chapter contains the general models of the SAWSurface Acoustic Waves (SAW) sensor operation along with their mathematical description. The general model is based on three basic couplings occurring in gas sensors: gas molecules-sensor structure, then sensor structure-SAWSurface Acoustic Waves (SAW) propagation and measurement of altered SAWSurface Acoustic Waves (SAW) parameters by a suitably sensitive detection system. The mathematical description takes into account the influence of the most important parameters of the layers and sensor structures on the SAWSurface Acoustic Waves (SAW) propagation. This description adopts a typical division into the mass effect, resulting from the mechanical parameters of the sensor structure, and the acoustoelectricAcoustoelectric (AE) effect, which is a consequence of its electrical parameters, mainly electrical surface conductivity. For the first time, a detailed theoretical description of the acoustoelectricAcoustoelectric (AE) effect for bilayer sensor structures was presented.

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Theoretical Models of SAW Sensor’s Operation

  • 章节

  • 发表日期：

    2025年

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  • Wiesław Jakubik

摘要

This chapter contains the general models of the SAWSurface Acoustic Waves (SAW) sensor operation along with their mathematical description. The general model is based on three basic couplings occurring in gas sensors: gas molecules-sensor structure, then sensor structure-SAWSurface Acoustic Waves (SAW) propagation and measurement of altered SAWSurface Acoustic Waves (SAW) parameters by a suitably sensitive detection system. The mathematical description takes into account the influence of the most important parameters of the layers and sensor structures on the SAWSurface Acoustic Waves (SAW) propagation. This description adopts a typical division into the mass effect, resulting from the mechanical parameters of the sensor structure, and the acoustoelectricAcoustoelectric (AE) effect, which is a consequence of its electrical parameters, mainly electrical surface conductivity. For the first time, a detailed theoretical description of the acoustoelectricAcoustoelectric (AE) effect for bilayer sensor structures was presented.