Microelectromechanical systems (MEMS) have revolutionized medicine, particularly in the field of drug delivery. Traditional methods of drug delivery, such as pills, often fail to effectively target specific areas, but MEMS-based approaches offer innovative solutions. By utilizing micro- and nanoscale drug carriers like micro patches, microparticles, bio-adhesives, and nanoparticles, drug delivery can be significantly improved. Advancements in oral drug delivery have been made possible through the development of these novel delivery methods. MEMS-based systems enable the formulation of drugs in forms that enhance absorption and therapeutic efficacy, optimizing treatment outcomes. Percutaneous transmission, an alternative to oral delivery, also shows promise. Microneedles allow drugs to penetrate the skin barrier without causing pain or nerve stimulation, improving the efficiency of drug delivery. In this chapter, we explore the various drug delivery methods facilitated by BioMEMS and their potential impact. We discuss the utilization of microfabrication techniques and MEMS technologies, enabling precise control over drug release and improved targeting. By examining the application of micro- and nanoscale drug carriers, as well as microneedles, we highlight the transformative potential of BioMEMS in drug delivery. We also address the challenges and opportunities associated with these advanced drug delivery methods. Optimization of drug formulation, carrier design, and delivery mechanisms is crucial for effective and safe administration. Rigorous in vivo testing, biocompatibility assessment, and reliable manufacturing processes are essential to translate these concepts into practical clinical applications. Implantable drug delivery systems have also benefited from BioMEMS technology, offering long-term, controlled drug release tailored to specific patient needs. Ongoing research focuses on improving patient compliance, device size, delivery rates, and biocompatibility. Integration of sensor technology enables real-time monitoring of physiological changes, ensuring precise and personalized medication administration. While challenges remain, including scaling-up processes, long-term performance stability, and material selection, the future of drug delivery lies in advancing microfabrication techniques and BioMEMS. These innovations have the potential to transform personalized medicine, improving patient outcomes and quality of life.