The stable isotope composition of silicon (Si) bears the potential to trace a variety of (bio)geochemical processes in the Earth system and beyond. In this chapter we provide detailed information relating to the preparation, purification and mass-spectrometric analysis of Si by multi-collector inductively-coupled plasma mass spectrometry (MC-ICP-MS) for the broad diversity of natural sample types of interest to the geochemist. Our aim is to provide practical information useful to those interested in setting up a MC-ICP-MS protocol for silicon stable isotope analysis in their own laboratory, or to adapt existing methods to new sample matrices.