Real-time, in-situ, shape measurements have arisen as an important stage for ensuring fabrication specifications and detecting part defects. Conventional shape inspection methods used in industries like a coordinate-measuring machine (CMM) lack the capabilities of real-time, full field-of-view measurements to detect anomalies early in the fabrication processes. This paper outlines our development of full field-of-view optical methods for real-time, in-situ, shape measurement applications. Our optical metrology method leverages structured light projection of dual-frequency fringe in tandem with phase-to-height look-up table (LUT). Dual-frequency fringes are functionalized using two Ronchi rulings with different densities grating illuminated with laser diode. Projected fringes are captured continuously with CCD cameras, and phases are extracted using Fourier domain analysis. LUT is then created to establish a one-to-one mapping between phase and height. Pairing dual-frequency fringe projection and LUT, real-time, in-situ, shape measurements are functionalized. The measurement resolution, maximum depth of measurement, and maximum framerate are presented. Current works show a promising solution for quality control monitoring in-situ for manufacturing applications. Future works consist of optimizing current shape measurement method to achieve higher temporal measurement rates and miniaturizing the method to adapt into custom manufacturing environments.

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Real-Time Shape Measurements In-Situ by Dual-Frequency Fringe Projection to Augment Smart Manufacturing

  • Howard Zheng,
  • Anthony Salerni,
  • Cosme Furlong

摘要

Real-time, in-situ, shape measurements have arisen as an important stage for ensuring fabrication specifications and detecting part defects. Conventional shape inspection methods used in industries like a coordinate-measuring machine (CMM) lack the capabilities of real-time, full field-of-view measurements to detect anomalies early in the fabrication processes. This paper outlines our development of full field-of-view optical methods for real-time, in-situ, shape measurement applications. Our optical metrology method leverages structured light projection of dual-frequency fringe in tandem with phase-to-height look-up table (LUT). Dual-frequency fringes are functionalized using two Ronchi rulings with different densities grating illuminated with laser diode. Projected fringes are captured continuously with CCD cameras, and phases are extracted using Fourier domain analysis. LUT is then created to establish a one-to-one mapping between phase and height. Pairing dual-frequency fringe projection and LUT, real-time, in-situ, shape measurements are functionalized. The measurement resolution, maximum depth of measurement, and maximum framerate are presented. Current works show a promising solution for quality control monitoring in-situ for manufacturing applications. Future works consist of optimizing current shape measurement method to achieve higher temporal measurement rates and miniaturizing the method to adapt into custom manufacturing environments.