Determination of Micropores in the Metal Using Eddy Current Sensor
摘要
Micro porous metal plays an important role in many applications including the sensing performance parameters of a thin film/thick sensor. Porous electrodes with pore size more than the pores of dielectric sensing film are used in many commercial sensors including the solid-state capacitive sensors made of Xentaur, USA for moisture measurement in electronic gases. At present, costly analytical instruments are used to study the pore morphology of porous materials. This paper investigates the eddy current sensor for determining the pore morphology of metal electrodes of µm order. The primary focus of this paper is to investigate the pore morphology of very thin metal electrodes with a micro-pore by using the eddy current technique suitable for sensor fabrication. The study employs simulations of eddy current sensor for different mesh electrodes having different pore sizes. Five different metallic mesh electrodes having different pore sizes were fabricated. Experiments were conducted and readings were recorded using Agilent 4294A impedance analyzer with frequency range of 1–100 MHz. Results demonstrate the effectiveness of the proposed method offering a valuable nondestructive testing technique for analyzing the pore morphology of the porous electrode with a sensitivity of 55 Ω/mm. Results demonstrate the effectiveness of the proposed eddy current sensor for analyzing the pore morphology of metal electrodes, offering a valuable non-destructive testing technique for material quality assurance for different applications.