The processes of formation and destruction of oxide films are often used as a basis for building models of the wear process. The work investigates the mechanism of wear, which consists of the formation and destruction of Fe2O3 films (moderate temperatures) or Fe3O4 films (elevated temperatures). The surface layers of the materials were studied by EOS and SEM methods on an Auger spectral microprobe JEOL JAMP – 10S under the following conditions: primary electron energy 5 keV, modulation amplitude 2–4 V, angle between the primary beam and the surface plane 90º, Auger electron registration angle 45º. The research results proved that in terms of mechanical properties and strength of adhesion to the base, oxidation films formed directly by friction (secondary structures) differ significantly from films formed thermally. A comparative analysis of the obtained data of the structures of the surface layer allows us to state that the contact of metallic materials with an oxidizing medium has a discrete nature of contact, as a result of which local stresses significantly exceed mechanical ones. It has been proven that the wear process in the oxidation mode does not lead to the formation of a fragmented surface layer of significant thickness, and the formation of a corresponding relief in a limited area indicates that the friction process at an arbitrary moment in time is accompanied by a deformation that does not cover the entire friction surface.