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As semiconductor manufacturingSemiconductor manufacturing continues to increase, the projected impact on environmental resources increases with particular focus on water availability and total energyEnergy consumption. Chip production requires huge amounts of energyEnergy, critical minerals, and ultrapure water, contributing to increased emissions among other environmental impactsEnvironmental Impacts. Public reporting of water, waste, energyEnergy, and Scope 1, 2, and 3 emissions is a recent practice among semiconductor companies through voluntary corporate reports. Many companies still do not report, and data remains unstandardized among individual sectors and across the supply chainSupply chain. Here, we present an assessment of resource consumption trends and environmental impactEnvironmental Impacts across the semiconductor supply chainSupply chain. We present a model index to compare performance toward sustainabilitySustainability goals with respect to energy efficiencyEnergy efficiency and CO2 emissions. This data is used to compare companies fab and foundry activity to identify best practices within this specific subsectors providing insightsSustainability benchmarking to move the industry towards a more sustainable path.

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Benchmarking Energy, Emissions, and Resource Sustainability in Semiconductor Manufacturing

  • 会议论文

  • 发表日期：

    2025年

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  • Cassidy J. Holdeman,
  • John A. Howarter

摘要

As semiconductor manufacturingSemiconductor manufacturing continues to increase, the projected impact on environmental resources increases with particular focus on water availability and total energyEnergy consumption. Chip production requires huge amounts of energyEnergy, critical minerals, and ultrapure water, contributing to increased emissions among other environmental impactsEnvironmental Impacts. Public reporting of water, waste, energyEnergy, and Scope 1, 2, and 3 emissions is a recent practice among semiconductor companies through voluntary corporate reports. Many companies still do not report, and data remains unstandardized among individual sectors and across the supply chainSupply chain. Here, we present an assessment of resource consumption trends and environmental impactEnvironmental Impacts across the semiconductor supply chainSupply chain. We present a model index to compare performance toward sustainabilitySustainability goals with respect to energy efficiencyEnergy efficiency and CO2 emissions. This data is used to compare companies fab and foundry activity to identify best practices within this specific subsectors providing insightsSustainability benchmarking to move the industry towards a more sustainable path.