Pixelated Capacitive Sensors (PCS) for Embedded Multi-Sensing
摘要
In the coming years, an increasing number of tiny autonomous smart IoT end-node devices will sense a variety of environmental signals from their environment, analyze the data locally, and trigger appropriate actions such as transmitting messages to a Cloud hub or activating actuators. This requires a generic low-cost, low-area, and low-power scalable true complementary metal-oxide-semiconductor (CMOS)-compatible multi-sensing approach that allows late definition and implementation of sensor functions with minimal integration effort. Here we present the pixelated capacitive sensor (PCS) technology, which provides a massively parallel, physical multi-sensing interface at the surface of a pre-fabricated CMOS chip onto which multiple sensing functions can be implemented next to each other with inkjet printing. We describe the PCS measurement principle, present two example applications (a PCS biosensor chip and a PCS multi-sensing chip functionalized for detecting ethanol vapor), and look ahead to future developments.