Abstract
This work presents the design and experimental investigations of a prototype heat flux sensor based on a thin YBaCuO (YBCO) film deposited by pulsed laser deposition onto single-crystal Al \({}_{2}\) O \({}_{3}\) ( \(1\bar{1}02\) ) substrates. A technologically simple approach is proposed for producing oriented YBCO films without expensive miscut substrates enabling realization of the transverse thermoelectric effect. Comprehensive studies of the morphology, phase composition, and thermoelectric properties of the films deposited at various substrate temperatures were carried out. The heat-flux sensor prototype fabricated from the film grown at 700 \({}^{\circ}\) C demonstrated the maximum sensitivity of 177 \(\mu\) V \(\cdot\) cm \({}^{2}\) /W, which is comparable with that of reference water-cooled sensors.
