<p>The use of hydrogen with BF₃ and GeF₄ improves the ion implant tool productivity by reducing the effects of the halogen cycle. Hydrogen delivery can be from pre-mixed cylinders with the dopant gas, or by co-flowing from a cylinder of 100% hydrogen, or by using an on-tool hydrogen generator. This paper provides a technical assessment of how each solution operates, the necessary safety protocols that should be employed, the maintenance requirements, and the hydrogen material quality. Experimental results show that moisture is present in the hydrogen generator stream which led to corrosion of gas system components in our simulated testing. The experimental data also includes measurements of other impurities as well as an assessment on the relative flammability risks of each solution. In our analysis pre-mixed cylinders provide the highest gas quality and the least maintenance of all the options evaluated.</p> Graphical abstract <p>This paper explores the implications of different sources of hydrogen and the impacts on gas systems when using with fluoride gases</p>